ʻO ka noi ohafnium tetrachloride(HfCl₄) i ka hana semiconductor ka mea nui i ka hoʻomākaukau ʻana i nā mea maʻamau dielectric kiʻekiʻe (kiʻekiʻe-k) a me nā kaʻina hoʻoheheʻe kemika (CVD). Eia kona mau pono kiko'ī.
ʻO ka hoʻomākaukau ʻana i nā mea maʻamau dielectric kiʻekiʻe
Ka hope: Me ka hoʻomohala ʻana i ka ʻenehana semiconductor, hoʻomau ka emi ʻana o ka nui o nā transistors, a ʻaʻole hiki ke hoʻokō ʻia ka papa insulation gate kuʻuna silicon dioxide (SiO₂) i nā pono o nā mea semiconductor hana kiʻekiʻe ma muli o nā pilikia leakage. Hiki i nā mea hoʻomau mau dielectric kiʻekiʻe ke hoʻonui i ka capacitance density o nā transistors, a laila e hoʻomaikaʻi ai i ka hana o nā mea hana.
Noi: He mea nui ka Hafnium tetrachloride no ka hoʻomākaukau ʻana i nā mea kiʻekiʻe-k (e like me ka hafnium dioxide, HfO₂). I ka wā o ka hoʻomākaukau ʻana, hoʻololi ʻia ka hafnium tetrachloride i nā kiʻiʻoniʻoni hafnium dioxide ma o nā hopena kemika. Loaʻa i kēia mau kiʻiʻoniʻoni nā waiwai dielectric maikaʻi loa a hiki ke hoʻohana ʻia e like me nā papa insulation puka o nā transistors. No ka laʻana, i ka waiho ʻana o ka puka kiʻekiʻe k dielectric HfO₂ o MOSFET (metal-oxide-semiconductor field-effect transistor), hiki ke hoʻohana ʻia ka hafnium tetrachloride e like me ke kinoea hoʻokomo o ka hafnium.
Ke Kaʻina Hana Hoʻopaʻa Huhu Kemika (CVD).
ʻO ka hope: ʻO ka hoʻoheheʻe ʻana i ka mahu kemika he ʻenehana hoʻoheheʻe kiʻiʻoniʻoni lahilahi i hoʻohana nui ʻia i ka hana semiconductor, e hana ana i kahi kiʻiʻoniʻoni lahilahi ma ka ʻili o ka substrate ma o nā hopena kemika.
Noi: Hoʻohana ʻia ʻo Hafnium tetrachloride ma ke ʻano he precursor i ke kaʻina CVD e waiho i nā kiʻiʻoniʻoni metala hafnium a i ʻole hafnium compound. ʻO kēia mau kiʻiʻoniʻoni he ʻano hoʻohana like ʻole i nā mea semiconductor, e like me ka hana ʻana i nā transistors kiʻekiʻe, hoʻomanaʻo, a me nā mea ʻē aʻe.
ʻO ke koʻikoʻi o ka ʻenehana hoʻomaʻemaʻe
Ka hope: I ka hana semiconductor, he hopena koʻikoʻi ka maʻemaʻe o ka mea i ka hana o ka hāmeʻa. Hiki i ka hafnium tetrachloride maʻemaʻe kiʻekiʻe ke hōʻoia i ka maikaʻi a me ka hana o ke kiʻi i waiho ʻia.
Noi: No ka hoʻokō ʻana i nā koi o ka hana chip kiʻekiʻe, ʻo ka maʻemaʻe o ka hafnium tetrachloride maʻamau e pono e hōʻea ma mua o 99.999%. No ka laʻana, ua loaʻa iā Jiangsu Nanda Optoelectronic Materials Co., Ltd. kahi patent no ka hoʻomākaukau ʻana i ka hafnium tetrachloride semiconductor-grade, e hoʻohana ana i kahi kaʻina sublimation decompression kiʻekiʻe e hoʻomaʻemaʻe i ka hafnium tetrachloride paʻa e hōʻoia i ka maʻemaʻe o ka hafnium tetrachloride i hōʻiliʻili ʻia ma mua o 99.999%. Hiki i kēia hafnium tetrachloride maʻemaʻe kiʻekiʻe ke hoʻokō pono i nā koi o ka ʻenehana hana 14nm.
ʻO ka hoʻohana ʻana i ka hafnium tetrachloride i ka hana semiconductor ʻaʻole ia e hoʻoikaika i ka hoʻomaikaʻi ʻana i ka hana semiconductor hāmeʻa, akā hāʻawi pū kekahi i kumu waiwai nui no ka hoʻomohala ʻana i ka ʻenehana semiconductor ʻoi aʻe i ka wā e hiki mai ana. Me ka holomua mau o ka ʻenehana hana semiconductor, ʻo nā koi no ka maʻemaʻe a me ka maikaʻi o ka hafnium tetrachloride e piʻi aʻe a kiʻekiʻe aʻe, kahi e hoʻonui ai i ka hoʻomohala ʻana i ka ʻenehana hoʻomaʻemaʻe pili.
| Inoa Huahana | Hafnium tetrachloride |
| CAS | 13499-05-3 |
| Huihui Hui | HfCl4 |
| Kaumaha Molekala | 320.3 |
| Ka nana aku | Pauda keʻokeʻo |
Pehea ka hoʻomaʻemaʻe ʻana o ka hafnium tetrachloride i nā mea semiconductor?
ʻO ka maʻemaʻe o ka hafnium tetrachloride (HfCl₄) he hopena koʻikoʻi loa i ka hana a me ka hilinaʻi o nā mea semiconductor. I ka hana semiconductor, hafnium tetrachloride maʻemaʻe kiʻekiʻe kekahi o nā kumu nui e hōʻoia i ka hana a me ka maikaʻi. Eia nā hopena kikoʻī o ka maʻemaʻe hafnium tetrachloride ma nā mea semiconductor:
1. Ka hopena i ka maikaʻi a me ka hana o nā kiʻiʻoniʻoni lahilahi
Ka kūlike a me ka mānoanoa o nā kiʻiʻoniʻoni lahilahi: Hiki i ka hafnium tetrachloride maʻemaʻe kiʻekiʻe ke hana i nā kiʻi ʻoniʻoni like ʻole a paʻa i ka wā o ka hoʻoheheʻe ʻana i ka mahu (CVD). Inā loaʻa i ka hafnium tetrachloride nā mea haumia, hiki i kēia mau haumia ke hana i nā hemahema a i ʻole nā lua i ka wā o ka waiho ʻana, e hopena i ka emi ʻana o ka like ʻole a me ka nui o ke kiʻiʻoniʻoni. No ka laʻana, hiki i nā haumia ke kumu i ka mānoanoa like ʻole o ke kiʻiʻoniʻoni, e pili ana i ka hana uila o ka hāmeʻa.
Nā waiwai dielectric o nā kiʻiʻoniʻoni lahilahi: I ka hoʻomākaukau ʻana i nā mea mau dielectric kiʻekiʻe (e like me ka hafnium dioxide, HfO₂), pili pono ka maʻemaʻe o ka hafnium tetrachloride i nā waiwai dielectric o ke kiʻi. Hiki i ka hafnium tetrachloride maʻemaʻe kiʻekiʻe ke hōʻoia i ka kiʻi hafnium dioxide i waiho ʻia he kiʻekiʻe dielectric mau, haʻahaʻa leakage a me nā waiwai insulation maikaʻi. Inā loaʻa i ka hafnium tetrachloride nā mea haumia metala a i ʻole nā mea haumia ʻē aʻe, hiki iā ia ke hoʻokomo i nā pahele hoʻopiʻi hou, hoʻonui i ka leakage au, a hoʻemi i nā waiwai dielectric o ke kiʻiʻoniʻoni.
2. Hoʻopilikia i nā waiwai uila o ka mea hana
Leakage au: ʻO ke kiʻekiʻe o ka maʻemaʻe o ka hafnium tetrachloride, ʻoi aku ka maʻemaʻe o ke kiʻiʻoniʻoni i waiho ʻia, a ʻoi aku ka liʻiliʻi o ka leakage. Hoʻopili pololei ka nui o ka leakage i ka hoʻohana ʻana i ka mana a me ka hana o nā mea semiconductor. Hiki i ka hafnium tetrachloride maʻemaʻe kiʻekiʻe ke hoʻohaʻahaʻa i ka leakage o kēia manawa, e hoʻomaikaʻi ai i ka pono o ka ikehu a me ka hana o ka hāmeʻa.
ʻO ka uila hoʻohaʻahaʻa: ʻO ka loaʻa ʻana o nā mea haumia hiki ke hoʻemi i ka haʻihaʻi uila o ke kiʻiʻoniʻoni, e ʻoi aku ka maʻalahi o ka hana ʻino ma lalo o ka uila kiʻekiʻe. Hiki i ka hafnium tetrachloride ke hoʻomaʻemaʻe kiʻekiʻe ke hoʻonui i ka voltage breakdown o ke kiʻi a hoʻonui i ka hilinaʻi o ka mea.
3. Hoʻopilikia i ka hilinaʻi a me ke ola o ka mea hana
ʻO ke kūpaʻa wela: Hiki i ka hafnium tetrachloride maʻemaʻe kiʻekiʻe ke mālama i ke kūpaʻa wela maikaʻi i kahi kūlana wela kiʻekiʻe, e pale ana i ka decomposition thermal a i ʻole ka hoʻololi ʻana o ka pae i hana ʻia e nā haumia. Kōkua kēia i ka hoʻomaikaʻi ʻana i ke kūpaʻa a me ke ola o ka hāmeʻa ma lalo o nā kūlana hana wela kiʻekiʻe.
Paʻa kemika: Hiki i nā mea haumia ke hana kemika me nā mea a puni, e hopena i ka emi ʻana o ka paʻa kemika o ka hāmeʻa. Hiki i ka hafnium tetrachloride maʻemaʻe kiʻekiʻe ke hōʻemi i ka hopena o kēia hopena kemika, a laila e hoʻomaikaʻi ai i ka hilinaʻi a me ke ola o ka hāmeʻa.
4. Ka hopena i ka hua hana o ka mea hana
E ho'ēmi i nā hemahema: Hiki i ka hafnium tetrachloride maʻemaʻe kiʻekiʻe ke hoʻemi i nā hemahema i ka hana hoʻomoe a hoʻomaikaʻi i ka maikaʻi o ke kiʻi. Kōkua kēia i ka hoʻomaikaʻi ʻana i ka hana hana o nā mea semiconductor a hōʻemi i nā kumukūʻai hana.
E hoʻomaikaʻi i ka kūlike: Hiki i ka hafnium tetrachloride maʻemaʻe kiʻekiʻe ke hōʻoia i nā ʻāpana like ʻole o nā kiʻiʻoniʻoni e hana mau, he mea koʻikoʻi ia no ka hana nui o nā mea semiconductor.
5. Ka hopena i nā kaʻina hana kiʻekiʻe
E hoʻokō i nā koi o nā kaʻina hana kiʻekiʻe: Ke hoʻomau nei nā kaʻina hana semiconductor i nā kaʻina hana liʻiliʻi, ke piʻi aʻe nei nā koi maʻemaʻe no nā mea waiwai. No ka laʻana, pono nā mea semiconductor me ke kaʻina hana o 14nm a ma lalo i ka maʻemaʻe o ka hafnium tetrachloride ma mua o 99.999%. Hiki i ka hafnium tetrachloride maʻemaʻe kiʻekiʻe ke hoʻokō i nā koi waiwai koʻikoʻi o kēia mau kaʻina holomua a hōʻoia i ka hana o nā mea hana ma ke ʻano o ka hana kiʻekiʻe, ka hoʻohana haʻahaʻa haʻahaʻa a me ka hilinaʻi kiʻekiʻe.
Hoʻoikaika i ka holomua ʻenehana: ʻAʻole hiki i ka hafnium tetrachloride maʻemaʻe kiʻekiʻe ke hoʻokō i nā pono o kēia manawa o ka hana semiconductor, akā hāʻawi pū kekahi i kumu waiwai nui no ka hoʻomohala ʻana i ka ʻenehana semiconductor ʻoi aku ka holomua i ka wā e hiki mai ana.
He hopena koʻikoʻi ka maʻemaʻe o ka hafnium tetrachloride i ka hana, hilinaʻi a me ke ola o nā mea semiconductor. Hiki i ka hafnium tetrachloride maʻemaʻe kiʻekiʻe ke hōʻoia i ka maikaʻi a me ka hana o ka kiʻiʻoniʻoni, e hoʻemi i ka leakage o kēia manawa, hoʻonui i ka voltage breakdown, hoʻonui i ka paʻa wela a me ke kūpaʻa kemika, a laila e hoʻomaikaʻi ai i ka hana holoʻokoʻa a me ka hilinaʻi o nā mea semiconductor. Me ka hoʻomau mau ʻana o ka ʻenehana hana semiconductor, e piʻi a kiʻekiʻe nā koi no ka maʻemaʻe o ka hafnium tetrachloride, kahi e hoʻonui ai i ka hoʻomohala ʻana i nā ʻenehana hoʻomaʻemaʻe pili.
Ka manawa hoʻouna: Apr-22-2025